| http://www.w3.org/ns/prov#value | - Although the plasma CVD process is employed in this Example as the vapor-phase synthesis process, it is also possible to use other processes such as a thermal CVD process of heating a thermoionic emission material for decomposing and/or exciting gas, an ion beam method of ionizing gas and applying the same to a substrate, a laser CVD process of decomposing and exciting gas with a laser beam, and t
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