| http://www.w3.org/ns/prov#value | - lating film including the inside of said contact hole; (e) removing said conductive film from outside of said contact to form a plug; (f) forming a second insulating film over said first insulating film and said plug; (g) removing said second insulating film at a portion corresponding to a region where a second wiring is to be formed, thereby forming a groove for wiring; (h) successively forming a
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