| http://www.w3.org/ns/prov#value | - lishing pad in the case where the secondly mentioned judging step judges that the polishing operation is not temporarily stopped; judging whether there is necessity or not for changing polishing conditions in the case where the thirdly recited judging step judges that there is not necessity to change the polishing pad, and changing the polishing conditions in the case where the thirdly recited jud
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