| http://www.w3.org/ns/prov#value | - Alternatively, variety of techniques have been utilized, such as configuring technique, e.g., bias sputtering and bias ECR-CVD, which chamfers the step of the wiring by sputter-etching during the membrane formation, coating technique to coat the membrane surface by an organic or inorganic spin on glass (SOG) membrane, and re-flowing technique softening the interlayer membrane by heat treatment to
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