| http://www.w3.org/ns/prov#value | - Although it is generally desirable to use a thermal damping fluid having comparable specific heat capacity, and (when the thermal damping fluid is a vaporizable liquid being vaporized on the vaporization element) comparable heat of vaporization and comparable vaporization temperature to that of the liquid reagent, responsive temperature control of the dispensed thermal damping fluid is advantageou
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