| http://www.w3.org/ns/prov#value | - Also, as shown in FIG. 3A, the recessed portion 5A formed by the recessed (111) plane is set to about 75 ??m in the depth, the recessed portions 5B and 5C are set to about 180 ??m in the depth, the pitches of the respective recessed portions are set to 270 ??m, and other dimensions are indicated in FIG. 3A. [0068] Also, there are provided the movable plates having the length L of the recessed port
|
