| http://www.w3.org/ns/prov#value | - lyoxometalate and an organic constituent, the polyoxometalate containing at least one element selected from the group consisting of tungsten, molybdenum, vanadium, niobium, and tantalum to provide a radiation sensitive resist film covering said exposed surfaces and said via walls; said polyoxometalate being soluble in water and polar organic solvents and including said one element in a high oxidat
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