About: http://webisa.webdatacommons.org/318521746

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A single crystal silicon wafer is used as a target for sputtering, and a sputtering gas is a mixture gas of argon and hydrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com