About: http://webisa.webdatacommons.org/318595158

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Used as a sample is a film obtained by applying the invention to a sample formed by patterning a silicon oxide (SiOx) film containing an alkyl group with a resist and removing the resist with a resist stripper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es