About: http://webisa.webdatacommons.org/318839664

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, a gate oxide 203 having a film thickness of 4 to 30 nm for example is formed on the surface of the P+ diffusion layer 202 by means of a thermal oxidation method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com