About: http://webisa.webdatacommons.org/318863985

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A dielectric layer 3, which can be silicon nitride, silicon dioxide, boron phosphorus silicon glass, aluminum oxide, polyimide or other dielectric material, is deposited on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com