About: http://webisa.webdatacommons.org/319005403

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A semiconductor device may include an insulating layer including an air gap formed between metal interconnections.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org