About: http://webisa.webdatacommons.org/319315738

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrate processing systems are used to process substrates such as silicon wafers in the production of integrated circuit devices and glass panels in the manufacture of flat panel displays.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com