About: http://webisa.webdatacommons.org/319324865

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, nitrogen or halogen such as fluorine or chlorine may be added to the amorphous semiconductor film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com