About: http://webisa.webdatacommons.org/319522225

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, methods in accordance with embodiments of the invention can more reliably form vias, conductive lines, and other conductive structures in the microelectronic substrate 110.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com