About: http://webisa.webdatacommons.org/319530046

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Accordingly, the present invention provides a relatively simple and reliable method for producing an apparatus including a large number of electrically-isolated micro spring structures.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com