About: http://webisa.webdatacommons.org/31964611

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Defects which can be inspected using the methods of the invention include particles, flakes, bumps, pits, voids, recesses, scratches and other irregularities or undesirable features that can exist in or on wafers.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk