About: http://webisa.webdatacommons.org/319648344

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the third layer, a layer including an oxide or a nitride of silicon is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com