About: http://webisa.webdatacommons.org/319928266

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Such an arrangement makes it possible to avoid the possible formation of conductive layers on the gasket 17 when the plasma chamber 1 is used for depositing conductive material, such as metal, on the substrate 4.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com