About: http://webisa.webdatacommons.org/319943608

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, metals other than aluminum and aluminum-based alloys can be deposited and planarized according to the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com