About: http://webisa.webdatacommons.org/320098817

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	deviation, and is a measure of the statistical spread of implanted ions (the
http://www.w3.org/ns/prov#wasQuotedFrom	slideshare.net