About: http://webisa.webdatacommons.org/320217929

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By the addition of other gases--rare gases, nitrogen, slowly etching gases, such as CF4 --, this speed can be reduced, if desired for practical uses, while maintaining the high etching selectivity.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au