About: http://webisa.webdatacommons.org/320259808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	By performing photolithography again, a resist pattern including the entire side wall of the spacer is formed and by performing the etching through the resist pattern, the groove 204 can be formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com