About: http://webisa.webdatacommons.org/320777159

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	According to a third aspect of the present invention, another method is provided for etching a layer of a material including silicon on a microelectronic structure.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk