About: http://webisa.webdatacommons.org/32080007

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Semiconductor wafers, in particular silicon wafers, produced according to the invention fulfill the demands imposed on the production of semiconductor components with line widths of less than or equal to 0.13 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com