About: http://webisa.webdatacommons.org/320919118

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2 is a graph which shows nitrogen content and growth rate of TaNx layers deposited by PE-ALD as a function of the ratio of partial pressure of nitrogen to partial pressure of hydrogen.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es