About: http://webisa.webdatacommons.org/3210151

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Further, the light screening thin film 301 may be formed after forming a surface stabilization film made, for example, of TaOx by a treatment such as reactive sputtering to the surface of the cleaned substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com