About: http://webisa.webdatacommons.org/321055289

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 23 is a cross-section illustrating a method of manufacturing a semiconductor device of the invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com