About: http://webisa.webdatacommons.org/32148523

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	er structure of a titanium nitride film, a film including aluminum as its main component, and a titanium nitride film can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com