About: http://webisa.webdatacommons.org/321809693

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Because of the step coverage problems associated with conventional deposition techniques used with workpieces, such as semiconductor wafers, a need exists for improvements in the apparatus and the method of coating workpieces.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com