About: http://webisa.webdatacommons.org/321966547

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides, limitation is encountered in coating of such portions as contact holes, through-holes or the like with a layer of a uniform thickness.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es