About: http://webisa.webdatacommons.org/322495160

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The device of claim 37 wherein the insulating material is a silicon nitride or silicon dioxide.42.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com