About: http://webisa.webdatacommons.org/322551447

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The ruthenium thin film-formed structure according to claim 1, wherein the substrate has a surface including trenches and vias, and the ruthenium thin film is formed on the surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com