About: http://webisa.webdatacommons.org/32255465

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Besides, there is a case where the substrate formed with a film is subjected to annealing at a temperature within a range from about 500.degree.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com