| http://www.w3.org/ns/prov#value | - The liner 888 can be made of materials such as aluminum, if the process gas is non-corrosive, such as TDEAH. The liner 888 can also be made of corrosion-resistant materials, such as quartz or pyrolytic boron nitride, if the process gas is corrosive, such as HfCl4.
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