About: http://webisa.webdatacommons.org/322595739

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the gas provided for annealing is a gas mixture including the noble gas and the hydrogen gas having a volume ratio between about 99:1 and about 90:10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca