About: http://webisa.webdatacommons.org/322691945

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first insulating layer 252 preferably comprises borophosphosilicate glass (BPSG), and may alternatively comprise other insulating materials such as silicon dioxide, for example.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com