| http://www.w3.org/ns/prov#value | - While the resin residues are removed by using a permanganic acid, a de-smear process can be also conducted using oxygen plasma. (10) Next, the resultant substrate is immersed in an oxidizer such as a chromic acid or a permanganic acid or the like, thereby providing a rough surface 50?? on the interlayer resin insulating layer 50 (see FIG. 3(D)).
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