About: http://webisa.webdatacommons.org/323007921

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The sensor may provide a location of the workpiece, the workpiece including a semiconductor wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.de