About: http://webisa.webdatacommons.org/323294299

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	When the hydrophobic coating is photoresist, the photoresist can be removed by first annealing the coated substrate at a relatively low temperature, for example at about 100.degree.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com