About: http://webisa.webdatacommons.org/323350562

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electrical properties were studied under varying deposition parameters, such as gas flow rate, deposition pressure, and postdeposition and postmetallization annealing processes.
http://www.w3.org/ns/prov#wasQuotedFrom	utwente.nl