About: http://webisa.webdatacommons.org/323581082

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5A is a diagram showing a schematic structure of an embodiment wherein this invention is applied to an ion implantation system, while FIG. 5B is a side view showing an end part of the structure illustrated in FIG. 5A;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com