About: http://webisa.webdatacommons.org/323736832

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a plan schematically showing the whole of the resist process system according to a third embodiment of the present invention; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com