About: http://webisa.webdatacommons.org/323805773

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 9 is a flowchart for explaining fabrication of devices (e.g., semiconductor chips, such as ICs, LSIs, and the like, LCDs, CCDs, etc.).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com