About: http://webisa.webdatacommons.org/324260031

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the illustrative embodiment, the substrate 12 comprises a semiconductor material such as monocrystalline silicon, germanium, silicon-on-glass, or silicon-on-sapphire.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com