About: http://webisa.webdatacommons.org/324286928

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	C. Annealed liner film 70 and FSG film 60 combine to effectively prevent materials such as hydrogen and boron included in interlayer insulating film 80 from infiltrating
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com