About: http://webisa.webdatacommons.org/324348752

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Instead of Ti, the second sacrificial film 21a may be made of refractory metal such as Ta, Mo, and W. In this specification, refractory metal includes Ti, Ta, Mo, and W.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr