About: http://webisa.webdatacommons.org/324396159

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ned between the wafer supporting surface of the susceptor and the exhaust port; and the pair of electrodes including a second annular electrode formed on the baffle. 11.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com