About: http://webisa.webdatacommons.org/324515601

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In another embodiment, the charge storage layer 401 may include another type of material, such as silicon nitride, hafnium oxide, titanium dioxide, or other metal oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com