About: http://webisa.webdatacommons.org/324520701

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In fabrication of the above fiber device modules, a substrate, such as a silicon wafer, is first processed to form the desired grooves with or without the through holes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com